advanced fluid and gas automatic control equipment, specialized gas
control units, ceramic valves, ultra-high precision electrically-actuated
needle valves, as well as ultra high purity valves, fittings and mass flow controllers are
suitable for use in a wide range of discrete manufacturing and materials
equipment and processes.
thermal series Mass Flow Controllers (FCS-T) are designed specifically for
semiconductor and solar applications that combines high accuracy,
better throughput and reduced system costs.
Exceptional Accuracy The FCS-Thermal Series MFCs achieve exceptional
accuracy, fast response, and excellent repeatability by utilizing digital technology.
High Performance Sensor Fujikin uses a low temperature flow sensor
that enables longer MFC life and prevents sensor clogging when
flowing reactive gases such as arsine, phosphine and diborane.
Highly Reliable Diaphragm Valve Fujikin has incorporated decades of
experience in valves in the control valve assembly. It utilizes fast
responding solenoid and piezoelectric actuators and dead space-free
construction to provide excellent gas displacement characteristics
and virtually no particle generation.
For more information on the Fujikin FCS-Thermal MFCs, click
here for a brochure.