|Fujikin is thrilled
to announce a breakthrough in advanced process gas delivery control.
Introducing the world's first Electrically Controlled Valve
(ECV) for semiconductor manufacturing equipment.
The ECV has a close-to-open response time of only 3.5ms, and an open-to-close
response time of 5ms. That's more than seventeen times faster
than that of the fastest conventional, pneumatically-actuated
valve's response time of 60ms. This next level of precise gas
control promotes tighter tolerances and ensures a higher level of
final product reliability and repeatability
Electrically-Actuated -- No Air
Driven exclusively by an electric signal, the ECV does not require
pneumatic tubing and eliminates the need for actuation solenoid valves.
One simple electrical connection to the ECV Drive Unit is all that's
Once there is no need for air-actuated valves, the following problems
and delays due to the inherent gas
transfer properties of air actuation
and tedious gas delivery time
such as temperature, regulated air
pressure fluctuations, air-line leaks, and number
of valves actuated simultaneously
Intuitive and Flexible Control
The standard ECV Drive Unit can operate up to eight ECV's simultaneously
and independently from each other using a standard switched input.
Furthermore, the power supply range is 100 VAC to 240 VAC, eliminating
the need for special power supplies.
Unsurpassed Leak Integrity
Outboard and inboard leak integrity -- as well as leakage across the
seat -- is orders of magnitude better than industry standards at an
ultra-tight 5x10 -12 Pa•m3 /sec (5x10 -11 acc/sec). This
value covers standard interfaces such as W-Seal Surface-Mount, tube stub, and male or female UJR type.
Our Focus is on Safety and Dependability
Fujikin's primary focus on all products manufactured has always
been the safety of personnel and equipment. This is why we exceed
the industry's minimum safety requirements -- both in product
life and performance -- by more than the MTTF (mean time to failure)
industry standard. The ECV also offers an extra level of safety by
mechanically closing in the unlikely event of a power failure.