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UPG fittings,
developed for use in leading edge, UHP semiconductor process gas delivery
systems, are 70% the size of our current line of fittings. A ball
bearing device is built into the nut to prevent torque to the seal,
reduce particle generation and to insure a reliable seal. The sealing
edge of the body and the sleeve share the same internal diameter as
the gasket forming a dead space free connection.
The body, sleeve and gasket are made from our standard SUS 316L Double
Melt Stainless Steel. This means no contamination in process gasses
due to outgassing, prevention of corrosion from reactive gasses and
reduced particle generation.
We have also included a gasket retainer as standard for easier installation.
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